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001-es BibID:	BIBFORM058827
Első szerző:	Lovics Riku (fizikus)
Cím:	Structural modification of boron-doped ZnO layers caused by hydrogen outgassing / R. Lovics, A. Csik, V. Takáts, J. Hakl, K. Vad
Dátum:	2014
Megjegyzések:	Boron-doped zinc oxide layers were prepared by Low Pressure Chemical Vapour Deposition method on polished Si, soda-lime glass for windows, and AF 45 Schott alkali free thin glass substrates. A short annealing of samples at 150oC or 300oC in air causes serious surface degradation of samples. The characteristic feature of degradation is the creation of bubbles and craters on the sample surface, which fully destroys the continuity of zinc oxide layers. The results of depth distribution mapping of elements indicate that the formation of bubbles is linked to increase in hydrogen concentration in the layer. The surface degradation was not noticed on samples deposited on AF 45 Schott alkali free thin glass which has a SiO2 diffusion barrier layer on the surface, only much fewer and smaller bubbles were visible. The results indicate the important role of hydrogen outgassing from the substrate.
Tárgyszavak:	Természettudományok Fizikai tudományok poszter
Megjelenés:	26th International Conference on Atomic Collisions in Solids. ICACS 26. Debrecen, Hungary, 13-18 July, 2014. - (2014), p. [1].
További szerzők:	Csik Attila (1975-) (fizikus) Takáts Viktor Hakl József Vad Kálmán
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat
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