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001-es BibID:	BIBFORM115141
035-os BibID:	(Scopus)85146644791 (WOS)000921935600001
Első szerző:	Mukherjee, Deshabrato
Cím:	Real-Time Ellipsometry at High and Low Temperatures / Mukherjee, Deshabrato; Petrik, Peter
Dátum:	2023
ISSN:	2470-1343
Megjegyzések:	Among the many available real-time characterization methods, ellipsometry stands out with the combination of high sensitivity and high speed as well as nondestructive, spectroscopic, and complex modeling capabilities. The thicknesses of thin films such as the complex dielectric function can be determined simultaneously with precisions down to sub-nanometer and 10?4, respectively. Consequently, the first applications of high- and low-temperature real-time ellipsometry have been related to the monitoring of layer growth and the determination of optical properties of metals, semiconductors, and superconductors, dating back to the late 1960s. Ellipsometry has been ever since a steady alternative of nonpolarimetric spectroscopies in applications where quantitative information (e.g., thickness, crystallinity, porosity, band gap, absorption) is to be determined in complex layered structures. In this article the main applications and fields of research are reviewed.
Tárgyszavak:	Természettudományok Fizikai tudományok idegen nyelvű folyóiratközlemény külföldi lapban folyóiratcikk Ellipsometry Optical properties Oxidation Phase transitions,Superconductors
Megjelenés:	ACS Omega. - 8 : 4 (2023), p. 3684-3697. -
További szerzők:	Petrik Péter
Pályázati támogatás:	K131515 OTKA
Internet cím:	Szerző által megadott URL DOI Intézményi repozitóriumban (DEA) tárolt változat
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