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001-es BibID:	BIBFORM058807
Első szerző:	Lovics Riku (fizikus)
Cím:	Depth Profile Analysis of Amorphous/Microcrystalline Si Solar Cells by Secondary Neutral Mass Spectroscopy / Riku Lovics, Viktor Takáts, Attila Csik, Gábor Langer, Kálmán Vad
Dátum:	2010
Megjegyzések:	Quantitative depth profile analysis performed by a Secondary Neutral Mass Spectrometer (SNMS) is apromising method to investigate the layer structure of solar cells. SNMS is a destructive analysis technique based onthe measurement of secondary neutral particles sputtered from the surface of a sample. The sputtering can beperformed by an ion beam. While the emitted secondary ions can be analyzed by Secondary Ion Mass Spectrometry(SIMS), the neutral atoms can be analyzed by SNMS. In the case of insulating samples the surface roughness andsurface charge accumulation can cause a serious problem during depth profile analyses. A high frequency modedeveloped to electron-gas SNMS in combination with a conducting metallic mesh placed on the sample surface canprevent this charge accumulation. TCO layers have high surface roughness, because a special surface texture in orderto maximize the solar cell efficiency. We have applied these methods to depth profile analysis of TCO layers and n-ip:Si diodes.
ISBN:	3-936338-26-4
Tárgyszavak:	Természettudományok Fizikai tudományok előadáskivonat
Megjelenés:	5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain. - p. 3152-3153. -
További szerzők:	Takáts Viktor Csik Attila (1975-) (fizikus) Langer Gábor Antal (1950-) (fizikus) Vad Kálmán
Pályázati támogatás:	TFSOLAR2 OTKA
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat DOI
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