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001-es BibID:	BIBFORM058808
Első szerző:	Lovics Riku (fizikus)
Cím:	Study of Atomic Migration in Zinc Oxide Layers by Depth Profile Analysis / Riku Lovics, Attila Csík, Viktor Takáts, Gábor Langer, Kálmán Vad
Dátum:	2012
Megjegyzések:	Atomic diffusion in ZnO layers produced by CVD was studied by quantitative depth profile analysesperformed by a Secondary Neutral Mass Spectrometer (SNMS). This sputter-based method is a suitable technique tomeasure the chemical composition of TCO layers and solar cell structures as a function of depth. The depth profilemeasurements reveal that the oxygen content of the ZnO layer is not a homogeneous one. The oxygen concentrationis higher near the film surface than near the substrate. This phenomenon seems to be an inherent property of the CVDtechnology. The oxygen distribution can be alter by annealing the sample in air due to the diffusion of the excessoxygen out of the film. The Na diffusion from the glass substrate through the ZnO layer was also studied by SNMSdepth profile analysis. We could show that Na from the substrate can migrate into the diode layer through the ZnO.
ISBN:	3-936338-28-0
Tárgyszavak:	Természettudományok Fizikai tudományok előadáskivonat
Megjelenés:	27th European Photovoltaic Solar Energy Conference and Exhibition. - p. 2530-2531. -
További szerzők:	Csik Attila (1975-) (fizikus) Takáts Viktor Langer Gábor Antal (1950-) (fizikus) Vad Kálmán
Pályázati támogatás:	TFSOLAR2 OTKA
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat DOI
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