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001-es BibID:	BIBFORM058837
Első szerző:	Lovics Riku (fizikus)
Cím:	Depth Profile Analysis of Amorphous/Microcrystalline Si Solar Cells by Secondary Neutral Mass Spectroscopy / R. Lovics, V. Takáts, A. Csik, G.A. Langer, K. Vad
Dátum:	2010
Megjegyzések:	Quantitative depth profile analysis performed by a Secondary Neutral Mass Spectrometer (SNMS) is a promising method to investigate the layerstructure of solar cells. SNMS is a destructive analysis technique based on the measurement of secondary neutral particles sputtered from the surfaceof a sample. The sputtering can be performed by an ion beam. While the emitted secondary ions can be analyzed by Secondary Ion MassSpectrometry (SIMS), the neutral atoms can be analyzed by SNMS. In the case of insulating samples the surface roughness and surface chargeaccumulation can cause a serious problem during depth profile analyses. The high frequency mode (HFM) developed to electron-gas SNMS and aconducting metallic mesh placed on the sample surface can prevent this charge accumulation. TCO layers have high surface roughness, because aspecial surface texture is inevitable to maximize the solar cell efficiency. We have applied these methods simultaneously during depth profile analysisof TCO layers and n-i-p:Si diodes.
Tárgyszavak:	Természettudományok Fizikai tudományok poszter
Megjelenés:	25th European Photovoltaic Solar Energy Conference and Exhibition, 5th World Conference on Photovoltaic Energy Conversion, Valencia, Spain : annual report. - (2010), p. 25.
További szerzők:	Takáts Viktor Csik Attila (1975-) (fizikus) Langer Gábor Antal (1950-) (fizikus) Vad Kálmán
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat
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