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001-es BibID:	BIBFORM058839
Első szerző:	Lovics Riku (fizikus)
Cím:	Thermal assisted motion of oxygen and hydrogen in zinc oxide layer / R. Lovics, A. Csik, V. Takáts, J. Hakl, K. Vad
Dátum:	2014
Megjegyzések:	Boron-doped zinc oxide layers were prepared by Low Pressure Chemical Vapour Deposition method on polished Si, soda-limeglass for windows, and AF 45 Schott alkali free thin glass substrates. A short annealing of samples at 150 OC or 300 OC in aircan cause a serious surface degradation of samples. The characteristic feature of degradation is the creation of bubbles andcraters on the sample surface, which fully destroys the continuity of zinc oxide layers. The results of depth distributionmapping of elements indicate that the formation of bubbles is linked to the increase in hydrogen and oxygen concentration inthe layer. The surface degradation was not experienced on samples deposited on AF 45 Schott alkali free thin glass which hasa SiO2 diffusion barrier layer on the surface, only much fewer and smaller bubbles were visible. The results indicate theimportant role of hydrogen outgassing from the substrate.
Tárgyszavak:	Természettudományok Fizikai tudományok poszter
Megjelenés:	16th International Conference on Thin Films : abstract book. - (2014), p. 256.
További szerzők:	Csik Attila (1975-) (fizikus) Takáts Viktor Hakl József Vad Kálmán
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat
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