Találati lista | Tudóstér

001-es BibID:	BIBFORM058838
Első szerző:	Lovics Riku (fizikus)
Cím:	Surface roughness and interface study by Secondary Neutral Mass Spectrometry / R. Lovics, V. Takáts, A. Csik, J. Hakl, G.A. Langer, Zs. Baji, Z. Lábadi, K. Vad
Dátum:	2012
Megjegyzések:	There are numerous models in the literature, which make effort to reconstruct the depth concentration profile measured bySecondary Ion Mass spectrometry (SIMS) or Auger-electron Spectroscopy (AES), but they are only partially applicable for SNMStechnique. Surface roughness, sputtered crater shape, detection rate of different constituent elements, and some other complexnanoscale physical behaviours were taken into account systematically in a quantitative depth profile analysis performed by SNMS.The evaluation method presented here is based on statistical and probability calculations of surface roughness determinedexperimentally before and after sputtering. We show that the surface roughness is an essential parameter in determination of the thinfilm layer structures.
Tárgyszavak:	Természettudományok Fizikai tudományok poszter
Megjelenés:	14th Joint Vacuum Conference, 12th Europena Vacuum Conference, 11th Annual Meeting of the German Vacuum Society, 19th Croatian-Slovenian Vacuum Meeting. Dubrovnik, Croatia, 4-8 June, 2012 : abstract book. - (2012), p. 211.
További szerzők:	Takáts Viktor Csik Attila (1975-) (fizikus) Hakl József Langer Gábor Antal (1950-) (fizikus) Baji Zs. Lábadi Zoltán Vad Kálmán
Internet cím:	Intézményi repozitóriumban (DEA) tárolt változat
Borító:
Saját polcon: