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001-es BibID:BIBFORM103231
035-os BibID:(cikkazonosító)110058 (WOS)000620647800001 (Scopus)85099383336
Első szerző:Zayachuk, Dmytro M.
Cím:Near-non-preferential sputtering of multicomponent solids as an effective way for production of dense cone shape arrays on a sputtered surface / D. M. Zayachuk, Y. D. Zayachuk, Cs. Buga, V. E. Slynko, A. Csík
Dátum:2021
ISSN:0042-207X
Megjegyzések:Interplay between preferential sputtering of multicomponent solids and topology of sputtered surface has been studied using a sequence of IVB tellurides PbTe, SnTe, and GeTe. The first experimental observation of the impact of near-non-preferential sputtering on the surface topology of multicomponent materials was made. In the example of SnTe, it was found that a sputtered surface resulting from its near-non-preferential sputtering is always covered with a dense array of cones of nanometer range of height. This observation opens the possibility for the simple method of formation of dense arrays of conical structures on solid surfaces by ordinary ion beam sputtering. Our experimental results show that to achieve this, a multicomponent composition, constituents of which are sputtered near-non-preferentially, has to be created.
Tárgyszavak:Természettudományok Fizikai tudományok idegen nyelvű folyóiratközlemény külföldi lapban
folyóiratcikk
Sputtering
SnTe
Surface topology
Cone shape structures
Megjelenés:Vacuum. - 186 (2021), p. 110058-110062. -
További szerzők:Zayachuk, Y. D. Buga Csaba (1992-) (fizikus) Slynko, Vasyl E. Csik Attila (1975-) (fizikus)
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